PAS
Filed: February 19, 1991
computer program for use with a device for measuring parameters of semiconductor wafers, including metal thickness and deposit…
Owned by: Therma-Wave, Inc.
Serial Number: 74139934
MMS
Filed: February 19, 1991
computer program for use with an optical measurement device for measuring grain structure thickness and reflectivity data…
Owned by: Therma-Wave, Inc.
Serial Number: 74139937
PW TEACH
Filed: February 19, 1991
computer program for use upon an optical measurement device to check a template of test areas on semiconductor wafers
Owned by: Therma-Wave, Inc.
Serial Number: 74140000
THERMA-PROBE IMAGER
Filed: February 19, 1991
optical measuring device for characterizing parameters of a sample and generating images, and particularly semiconductor…
Owned by: Therma-Wave, Inc.
Serial Number: 74140044
PWAUTO
Filed: February 19, 1991
computer program for use with an optical measurement device to permit automatic measurement of semiconductor wafers
Owned by: Therma-Wave, Inc.
Serial Number: 74140663
META-PROBE
Filed: March 11, 1997
optical inspection equipment for monitoring layers on semiconductor samples
Owned by: Therma-Wave, Inc.
Serial Number: 75255534
FPE
OPTICAL INSPECTION DEVICES USED FOR MONITORING THE MANUFACTURE OF SEMICONDUCTORS AND MEMORY MEDIA
Owned by: Therma-Wave, Inc.
Serial Number: 75653217
FAB PRODUCTIVITY ENHANCEMENT
OPTICAL INSPECTION DEVICES USED FOR MONITORING THE MANUFACTURE OF SEMICONDUCTORS AND MEMORY MEDIA
Owned by: Therma-Wave, Inc.
Serial Number: 75653220
AIRBORNE FILM DESORBER
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE…
Owned by: Therma-Wave, Inc.
Serial Number: 75683900
AFD
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY A UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE…
Owned by: Therma-Wave, Inc.
Serial Number: 75684608
EFD
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY A UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE…
Owned by: Therma-Wave, Inc.
Serial Number: 76025683
META-PROBE X
INSPECTION EQUIPMENT FOR MONITORING LAYERS ON SEMICONDUCTOR SAMPLES
Owned by: Therma-Wave, Inc.
Serial Number: 76219720
COILS
LIGHT SOURCE, NAMELY TWO OR MORE LAMPS ALIGNED IN A MANNER TO PROVIDE A PROBE BEAM FOR THE OPTICAL INSPECTION OF A SEMICONDUCTOR…
Owned by: Therma-Wave, Inc.
Serial Number: 76274897
CD-PROBE
OPTICAL MEASUREMENT DEVICE FOR EVALUATING PERIODIC STRUCTURES ON SEMICONDUCTOR WAFERS
Owned by: Therma-Wave, Inc.
Serial Number: 76315694
AQUA-PROBE
Inspection apparatus used for evaluating thin film parameters and critical dimensions of a semiconductor wafer
Owned by: Therma-Wave, Inc.
Serial Number: 76533563
CD PLUS
OPTICAL MEASUREMENT DEVICE FOR EVALUATING CHARACTERISTICS OF A SEMICONDUCTOR WAFER
Owned by: Therma-Wave, Inc.
Serial Number: 76548247
