PRIMAXX2
Filed: January 27, 1994
dry semiconductor processing equipment, namely plasma-assisted downstream photo-chemical etchers
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 74483183
ULTIMAXX
Filed: January 31, 1994
dry semiconductor processing equipment, namely downstream microwave/photo-chemical cluster strip systems, comprising vacuum…
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 74484690
GAMA 1
Filed: February 28, 1994
automated acid/solvent wet station for use in semi-conductor wafer cleaning, stripping and etching
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 74495155
CHEMPOINTE
Filed: February 28, 1994
industrial processing equipment, namely point-of-use chemical generators of process chemicals from a gaseous source; point…
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 74495156
MICROCHEM
Filed: July 10, 1996
chemicals for the processing of ferroelectric and other high dielectric materials
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 75131950
PRIMAXX2F
Filed: April 3, 1997
semiconductor processing equipment, namely, modules for depositing liquid thin films via an atomization process
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 75269169
AKRION
Filed: January 7, 1998
INTEGRATED SYSTEM FOR USE IN SEMICONDUCTOR MANUFACTURING AND PROCESSING, NAMELY, EQUIPMENT TO CLEAN, ETCH AND STRIP SEMICONDUCTOR…
Owned by: SUBMICRON SYSTEMS, INC.
Serial Number: 75414916
