LASAIR
Filed: June 19, 1989
AEROSOL PARTICLE COUNTERS
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 73807261
SHUR-SHOT
Filed: December 30, 1991
electronic hydrogen fluoride leak detector
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 74234268
AIRSENTRY-IMS
Filed: November 9, 1995
air quality monitor for toxic atmospheric pollutants for commercial use
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75017159
STACKMASTER-IMS
Filed: November 9, 1995
air quality monitor
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75017555
PROSENTRY-IMS
Filed: November 9, 1995
air quality monitor
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75017556
IONPRO-IMS
Filed: February 11, 1997
analyers to monitor hazardous gases in ambient, process and stack gases
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75240312
DATA TOUCH
Filed: July 24, 1997
laboratory equipment, namely, data acquisition systems and displays for interfacing with particle measurement sensors for…
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75330282
ABACUS
Filed: March 2, 1998
Hand-held instrument for monitoring air-borne particulates
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75442509
FIBERVAC
Fiber optic sensor for monitoring particulates inside vacuum process chambers, for use in the semiconductor manufacturing…
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75633464
SLURRYCHEK
Sensor for evaluating and monitoring Chemical Mechanical Planarization slurry and other slurries
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 75798521
SLURRYALERT
OPTICAL SENSOR FOR EVALUATING AND MONITORING THE SIZE AND QUANTITY OF PARTICLES SUSPENDED IN CHEMICAL MECHANICAL PLANARIZATION…
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 76053234
ULTRAAIR
Aerosol particle counters
Owned by: PARTICLE MEASURING SYSTEMS, INC.
Serial Number: 78270549
