NANOLINE
Filed: November 24, 1980
Electro-Optical Automatic Fine Line Width Measure Apparatus
Owned by: Nanometrics Incorporated
Serial Number: 73287280
NANOMETRICS
Filed: November 24, 1980
Electro-Optical Instruments for Measuring Microscopic Objects
Owned by: Nanometrics Incorporated
Serial Number: 73287281
CWIKSCAN
Filed: July 18, 1985
ELECTRON MICROSCOPES AND PARTS THEREFOR
Owned by: Nanometrics Incorporated
Serial Number: 73548677
ZEE
Filed: November 12, 1985
ZIRCONIATED ELECTRON EMITTER GUN ELECTRON SOURCE
Owned by: Nanometrics Incorporated
Serial Number: 73567979
"CAL-PAC"
Filed: February 17, 1987
FILM THICKNESS REFERENCE STANDARDS FOR FILM THICKNESS MEASUREMENT INSTRUMENTS
Owned by: Nanometrics Incorporated
Serial Number: 73646735
NANOBALANCE
Filed: November 5, 1993
electronic weighing machine to measure the average amount of material added to or removed from a sample
Owned by: Nanometrics Incorporated
Serial Number: 74454673
NANOMAGIC
Filed: August 11, 1994
computer software program for metrology and industrial machine control
Owned by: Nanometrics Incorporated
Serial Number: 74559902
IVS
Filed: September 19, 1995
electronic measuring system comprising computer, digital image enhancement computer hardware, microscope, and edge detection…
Owned by: Nanometrics Incorporated
Serial Number: 74731161
METALSPEC
Filed: January 21, 1997
scientific instrument for film metrology applications, namely, metal thickness measuring apparatus, controlled by a computer…
Owned by: Nanometrics Incorporated
Serial Number: 75229074
NANOMETRA
Filed: March 6, 1998
Scientific instrument for metrology applications, namely, a metrology unit which is used to measure the critical dimensions…
Owned by: Nanometrics Incorporated
Serial Number: 75446145
EPIC
Filed: May 18, 1998
metrology system for the analysis and determination of properties such as thickness and optical constants of films on samples…
Owned by: Nanometrics Incorporated
Serial Number: 75486723
METRASPEC
scientific measuring instrument used to measure critical dimensions, lithography overlay registration, film thickness, and…
Owned by: Nanometrics Incorporated
Serial Number: 75542214
MIGHTYSPEC
A metrology tool for measuring the thickness, and analyzing the composition of certain films such as, but not limited to…
Owned by: Nanometrics Incorporated
Serial Number: 75593732
MEASURE THIS
MEASUREMENT SYSTEMS FOR THE MICRO-ELECTRONIC INDUSTRIES FOR CRITICAL DIMENSION CONTROL, COMPRISING OPTICAL AND ROBOTIC COMPONENTS…
Owned by: Nanometrics Incorporated
Serial Number: 75664751
INTOOL
Metrology and inspection systems for integration into semiconductor wafer, magnetic read-write head, and flat panel display…
Owned by: Nanometrics Incorporated
Serial Number: 75702212
NANOLINE
Electro-optical automatic fine line width metrology apparatus for measuring physical dimensions of features found on samples…
Owned by: Nanometrics Incorporated
Serial Number: 76251587
TNK
Metrology instrument, namely, apparatus for measuring thickness and/or optical properties of films on samples
Owned by: Nanometrics Incorporated
Serial Number: 76303604
NANOOCD
OPTICAL METROLOGY INSTRUMENT USED TO MEASURE MICROSCOPIC FEATURES OF SAMPLES, PARTICULARLY, OF SEMICONDUCTOR WAFERS, FLAT…
Owned by: Nanometrics Incorporated
Serial Number: 76317800
NANOCD
Metrology instrument utilizing an optical technique for measuring microscopic features on samples, such as semiconductor…
Owned by: Nanometrics Incorporated
Serial Number: 76317801
NANOOCS
Overlay optical metrology systems comprised of measurement optics, wafer handling mechanisms and system control hardware…
Owned by: Nanometrics Incorporated
Serial Number: 76391052
NANOUDI
Metrology system for the detection and measurement of particles and defects comprised principally of low distortion optics…
Owned by: Nanometrics Incorporated
Serial Number: 76442279
OCDSE
combination of optical metrology instruments for measuring such things as microscopic dimensions and film thickness features…
Owned by: Nanometrics Incorporated
Serial Number: 76444643
NANOCLP
Laser scanners and reflectometers for industrial inspection, namely metrology modules employing optical measuring techniques…
Owned by: Nanometrics Incorporated
Serial Number: 76466035
N,K EXPERT
software expert system for the automatic analysis of optical data, e;g;, reflectometry, ellipsometry, scatterometry, or…
Owned by: Nanometrics Incorporated
Serial Number: 76613111
PREDICTIVE METRICS
Metrology products for optimizing manufacturing processes through the science of measurement
Owned by: Nanometrics Incorporated
Serial Number: 76668127
PREDICTIVE METRICS
Metrology products, namely, optical instruments, namely, ellipsometers, reflectometers, interferometers, scatterometers,…
Owned by: Nanometrics Incorporated
Serial Number: 76670761
NANOLYNX
Apparatus for handling semi-conductor wafers designed to support multiple metrology measuring device modules
Owned by: Nanometrics Incorporated
Serial Number: 76680167
LYNXWARE
Computer software for controlling the metrology measuring device modules that are attached to units that process semiconductor…
Owned by: Nanometrics Incorporated
Serial Number: 76680269
CALIPER INSIGHT
Metrology system consisting of an automated wafer handling system consisting of an XY theta stage and vertical axis drive…
Owned by: Nanometrics Incorporated
Serial Number: 76683287
CALIPER MOSAIC
Metrology system, namely, an automated wafer handling system comprised of axis drives for positioning the wafer, an optical…
Owned by: Nanometrics Incorporated
Serial Number: 77711584
NANOLYNX
Apparatus for handling semiconductor wafers designed to support multiple metrology measuring device modules
Owned by: Nanometrics Incorporated
Serial Number: 77726367
SENTINEL
Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras…
Owned by: Nanometrics Incorporated
Serial Number: 77771069
SENTINEL PLI
Optical inspection system for silicon solar cell wafers in various stages of processing, said system comprised of imaging…
Owned by: Nanometrics Incorporated
Serial Number: 77771084
VERTEX
Optical inspection apparatus for inspection and measurement of semiconductor wafers and similar substrates in various stages…
Owned by: Nanometrics Incorporated
Serial Number: 85244594
SENTINEL
Optical inspection system for semiconductor wafers in various stages of processing, said system comprised of imaging cameras…
Owned by: Nanometrics Incorporated
Serial Number: 86028955
ZBEAM
Metrology apparatus for inspection of semiconductor wafers, substrates and lithographic masks including analysis of substrate…
Owned by: Nanometrics Incorporated
Serial Number: 88032556
ZFECT
Computer software for use in inspecting semiconductor wafers, substrates and lithographic masks including analysis of substrate…
Owned by: Nanometrics Incorporated
Serial Number: 88032561
