MKS Instruments, Inc. Trademarks Page 1

MKS Instruments, Inc. Trademarks

BARATRON

Filed: July 20, 1981
Capacitance Manometers for Measuring for Vacuum Pressure
Owned by: MKS Instruments, Inc.
Serial Number: 73319899

Filed: January 12, 1984
Sensors and Electrical Instrumentation and Power Supplies and Signal Conditioners and Analog and Digital Meters for Measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 73460587

M K S

ASTEX

Filed: March 28, 1988
MICROWAVE PLASMA GENERATOR UNITS AND COMPONENT PARTS THEREFOR FOR USE IN INDUSTRIAL AND SCIENTIFIC APPLICATIONS
Owned by: MKS Instruments, Inc.
Serial Number: 73718856

MASS-FLO

Filed: July 2, 1990
instruments for measuring and controlling the flow of gases and vapors
Owned by: MKS Instruments, Inc.
Serial Number: 74074899

CALSTAND

Filed: July 2, 1990
apparatus for calibrating pressure and flow transducers
Owned by: MKS Instruments, Inc.
Serial Number: 74075006

HPS

Filed: September 9, 1998
APPARATUS COMPONENTS FOR MATERIALS PROCESSING, NAMELY METAL FLANGES, METAL FITTINGS FOR GAS LINES
Owned by: MKS Instruments, Inc.
Serial Number: 75550234

VI PROBE

Filed: October 5, 1998
RADIO FREQUENCY PLASMA IMPEDANCE ANALYZERS AND RELATED CONTROL EQUIPMENT, NAMELY SENSOR HEADS, CABLES, TRANSFORMERS USED…
Owned by: MKS Instruments, Inc.
Serial Number: 75565156

SMARTPOWER

Filed: April 30, 1999
electrical power supplies, namely, microwave apparatus that matches load impedance and source impedance
Owned by: MKS Instruments, Inc.
Serial Number: 75694325

LIQUOZON

Filed: April 30, 1999
ozone generators
Owned by: MKS Instruments, Inc.
Serial Number: 75694345

MKS INSTRUMENTS

Filed: May 11, 1999
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 75706479

SPECTRUM

Filed: May 17, 2000
RADIO FREQUENCY PLASMA GENERATORS FOR USE IN THIN FILM PROCESSING
Owned by: MKS Instruments, Inc.
Serial Number: 76050428

PICO

Mass spectrometer-based leak detectors for use in detecting gases used in connection with semiconductor manufacturing, air…
Owned by: MKS Instruments, Inc.
Serial Number: 76117500

TRU-FLO

Filed: May 16, 2001
integrated diagnostic instrument composed of a chamber for providing a small gas volume, a pressure sensor, shut off values…
Owned by: MKS Instruments, Inc.
Serial Number: 76257907

MKS

Filed: May 21, 2001
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 76260293

MKS TECHNOLOGY FOR PRODUCTIVITY

Filed: June 13, 2001
Sensors and electrical instrumentation and power supplies and signal conditioners and analog and digital meters for measurement…
Owned by: MKS Instruments, Inc.
Serial Number: 76271135

I-BARATRON

Filed: October 31, 2001
CAPACITANCE MANOMETERS FOR MEASURING FOR VACUUM PRESSURE
Owned by: MKS Instruments, Inc.
Serial Number: 76331799

SEMOZON

Filed: October 10, 2002
Ozone Generator For Manufacture Of Ultra Pure, High Concentration Ozone Through Passing Oxygen Through A Silent Electrical…
Owned by: MKS Instruments, Inc.
Serial Number: 78173035

O3MEGA

Ozone gas generator and delivery systems comprised primarily of a pump, vaporizer, and power controller, used in the semiconductor…
Owned by: MKS Instruments, Inc.
Serial Number: 78562042

SUREPOWER

Radio Frequency (RF) Generators
Owned by: MKS Instruments, Inc.
Serial Number: 78562083

R*EVOLUTION

PLASMA GENERATORS FOR USE IN THE SEMICONDUCTOR AND BIOPHARMACEUTICAL INDUSTRIES
Owned by: MKS Instruments, Inc.
Serial Number: 78613986

AIRGARD

Gas analyzer for detecting chemical agents
Owned by: MKS Instruments, Inc.
Serial Number: 78793063

EO3

Ozone gas generators; ozone gas concentrators; ozone gas generators and delivery systems comprised primarily of a pump,…
Owned by: MKS Instruments, Inc.
Serial Number: 85778389

SURROUND THE WORKPIECE

Product design and development, system level integration, research and development, system, subsystem and component selection…
Owned by: MKS Instruments, Inc.
Serial Number: 87960632

TRURAD

Filed: June 25, 2018
Plasma generator for etching, photoresist removal, strip, sputtering, deposition, chemical vapor deposition, ion implantation…
Owned by: MKS Instruments, Inc.
Serial Number: 88014240

SPARCLEAN

Plasma generator for etching, atomic later etch, sputtering, chemical vapor deposition, atomic layer deposition, ion implantation…
Owned by: MKS Instruments, Inc.
Serial Number: 88014243

MKS NEWPORT

Filed: July 25, 2019
measuring, testing and laboratory equipment in the fields of optics and photonics, namely, mirrors, lenses, beamsplitters…
Owned by: MKS Instruments, Inc.
Serial Number: 88536844

SURROUND THE CHAMBER

Filed: August 7, 2019
Maintenance, repair and calibration of products for use in semiconductor manufacturing processes
Owned by: MKS Instruments, Inc.
Serial Number: 88569347

CLEANLINE

Filed: June 29, 2020
Plasma generator for etching byproduct from vacuum piping, components, and systems
Owned by: MKS Instruments, Inc.
Serial Number: 90026379

ETRAC

Filed: January 21, 2021
Radio Frequency (RF) matching networks
Owned by: MKS Instruments, Inc.
Serial Number: 90479959

EDGE

Filed: January 21, 2021
Radio Frequency (RF) generators
Owned by: MKS Instruments, Inc.
Serial Number: 90479968

OPTIMIZE THE INTERCONNECT

Filed: May 23, 2022
Installation, set-up, maintenance and repair services of equipment used in the production of printed circuit boards and…
Owned by: MKS Instruments, Inc.
Serial Number: 97424180

MKS

Filed: June 17, 2022
Industrial programmable computer hardware; plasma generators for supplying activated gases; dissolved gas generation and…
Owned by: MKS Instruments, Inc.
Serial Number: 97463375

MKS

Filed: June 17, 2022
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT
Owned by: MKS Instruments, Inc.
Serial Number: 97463381

SURROUND THE WAFER

Filed: December 19, 2022
Maintenance and repair of products for use in semiconductor manufacturing processes
Owned by: MKS Instruments, Inc.
Serial Number: 97723378