SOURCE METROLOGY INSTRUMENT (SMI)
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software…
Owned by: Litel Instruments
Serial Number: 76574016
IN-SITU INTERFEROMETER (ISI)
interferometer and a software package for analyzing data received from an overlay tool
Owned by: Litel Instruments
Serial Number: 76574017
INSPECSTEP INTERFEROMETER (ISI)
interferometer and a software package for analyzing data received from an overlay tool
Owned by: Litel Instruments
Serial Number: 76574018
DISTORTION MAPPER (DMAP)
optical distortion mapping device comprised of computer software and reticle for determining distortion of a lithographic…
Owned by: Litel Instruments
Serial Number: 76578263
TRANSMISSION MAPPER (TMAP)
Combination of a software package and a specialized reticle for use in determining the state of the lens angular transmittance…
Owned by: Litel Instruments
Serial Number: 76578264
HIGH ACCURACY IN-SITU INTERFEROMETER (HA-ISI)
Interferometer and software package for analyzing numerical bar-in-bar offset or shift data received from an overlay tool…
Owned by: Litel Instruments
Serial Number: 76587118
ADVANCED SOURCE METROLOGY INSTRUMENT (ASMI)
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software…
Owned by: Litel Instruments
Serial Number: 76587120
HIGH ACCURACY SOURCE METROLOGY INSTRUMENT (HA-SMI).
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software…
Owned by: Litel Instruments
Serial Number: 76587121
HIGH ACCURACY INSPECSTEP INTERFEROMETER (HA-ISI)
Interferometer and software package for analyzing semiconductor chip optical test structure data received from an overlay…
Owned by: Litel Instruments
Serial Number: 76597005
HYPER NA SMI
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software…
Owned by: Litel Instruments
Serial Number: 76666540
HYPER NA ISI
Components of optical instruments for use in the semiconductor industry, namely, apparatus comprised of computer software…
Owned by: Litel Instruments
Serial Number: 76667865
LITEL GPP
Computer software for processing digital images; Vehicle detection equipment, namely, display monitors, computers, image…
Owned by: Litel Instruments
Serial Number: 85763425
LITEL MAC
Computer hardware and computer software programs for the integration of text, audio, graphics, still images and moving pictures…
Owned by: Litel Instruments
Serial Number: 85764559