MICROSENSE
Filed: January 11, 1972
NON-CONTACT DIMENSIONAL GAGING APPARATUS
Owned by: KLA CORPORATION
Serial Number: 72412355
ALPHA-STEP
Filed: February 21, 1978
METROLOGY INSTRUMENTS-NAMELY, INSTRUMENTS FOR MAPPING VERTICAL PROFILES OF SEMICONDUCTOR WAFERS, THIN FILMS, AND THE LIKE…
Owned by: KLA CORPORATION
Serial Number: 73159312
OMNIMAP
Filed: March 22, 1984
SEMICONDUCTOR WAFER RESISTIVITY MAPPING SYSTEM COMPRISED OF SOME OR ALL OF THE FOLLOWING: PROGRAMMABLE COMPUTER, GRAPHICS…
Owned by: KLA CORPORATION
Serial Number: 73471544
PROMETRIX
Filed: March 22, 1984
Computer-Based System for Evaluating the Performance of Semiconductor Wafer Processing Equipment Comprised of Resistivity…
Owned by: KLA CORPORATION
Serial Number: 73471545
STATTRAX
Filed: February 13, 1987
COMPUTER PROGRAMS FOR USE IN STATISTICAL ANALYSIS OF PROCESS FLOW
Owned by: KLA CORPORATION
Serial Number: 73644488
SURFSCAN
Filed: April 10, 1989
SURFACE DEFECT DETECTORS
Owned by: KLA CORPORATION
Serial Number: 73792473
ULTRASCAN
Filed: November 16, 1989
SEMICONDUCTOR TEST STATIONS
Owned by: KLA CORPORATION
Serial Number: 74000510
OPTI-PROBE
Filed: April 4, 1990
measurement device for evaluating dielectric films
Owned by: KLA CORPORATION
Serial Number: 74045811
THERMA-PROBE
Filed: February 19, 1991
optical measuring device for characterizing parameters of a sample and particularly semi-conductor wafers
Owned by: KLA CORPORATION
Serial Number: 74140049
NANO INDENTER
Filed: September 30, 1991
scientific, electrical and measuring apparatus and instruments for determining and analyzing physical properties of materials…
Owned by: KLA CORPORATION
Serial Number: 74208342
ULTRAGAGE
Filed: December 1, 1992
semiconductor wafer measurement stations for the measurement of semiconductor wafer flatness, shape, thickness, conductivity…
Owned by: KLA CORPORATION
Serial Number: 74335774
ADE
Filed: August 5, 1993
house mark for instruments and systems for the measurement and/or modification of physical, optical and/or electrical properties…
Owned by: KLA CORPORATION
Serial Number: 74421412
ADE
Filed: August 5, 1993
measuring and gauging equipment and instruments for physical, optical and/or electrical properties applications in industrial…
Owned by: KLA CORPORATION
Serial Number: 74422406
THERMAL MAP
Filed: March 17, 1995
computer software for displaying thermal data from an instrumented wafer in a wafer fabrication system and software user…
Owned by: KLA CORPORATION
Serial Number: 74648132
SENSARRAY
Filed: March 24, 1995
wafer calibration equipment, namely, instrument wafers, and thermocouple scanners and monitors
Owned by: KLA CORPORATION
Serial Number: 74651089
QUANTOX
Filed: August 14, 1995
electronic test system, comprising a computer, waferhandlilng robotics, and current and voltage instruments that tests semiconductors…
Owned by: KLA CORPORATION
Serial Number: 74714847
MICROVIEW
Filed: November 22, 1995
instrument hardware and computer software for inspecting and characterizing surfaces, namely surfaces of semiconductor wafers…
Owned by: KLA CORPORATION
Serial Number: 75023317
HRP
Filed: October 15, 1996
stylus instruments and computer software for inspecting and characterizing surfaces, including surfaces of semiconductor…
Owned by: KLA CORPORATION
Serial Number: 75181704
ULTRALITE
Filed: October 15, 1996
sensor apparatus for inspecting and characterizing surfaces, including surfaces of semiconductor wafers, discs, and flat…
Owned by: KLA CORPORATION
Serial Number: 75181771
DURASHARP
Filed: October 15, 1996
stylus apparatus for inspecting and characterizing surfaces, including surfaces of semiconductor wafers, discs and flat…
Owned by: KLA CORPORATION
Serial Number: 75181772
KLA TENCOR
Filed: May 14, 1997
instruments for testing and inspecting physical and electrical properties of semiconductors; computer hardware and software…
Owned by: KLA CORPORATION
Serial Number: 75291778
THERMA-WAVE
Filed: June 4, 1997
optical inspection equipment particularly suited for semiconductor evaluation
Owned by: KLA CORPORATION
Serial Number: 75303235
BEAM PROFILE REFLECTOMETRY
Filed: August 18, 1997
OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN…
Owned by: KLA CORPORATION
Serial Number: 75342802
BEAM PROFILE ELLIPSOMETRY
Filed: August 18, 1997
OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN…
Owned by: KLA CORPORATION
Serial Number: 75344868
BPE
Filed: August 18, 1997
OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN…
Owned by: KLA CORPORATION
Serial Number: 75344869
BPR
Filed: August 18, 1997
OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN…
Owned by: KLA CORPORATION
Serial Number: 75344870
AE
Filed: December 18, 1997
OPTICAL INSPECTION EQUIPMENT, COMPRISED OF AT LEAST ONE LIGHT SOURCE ARRANGED TO INTERACT WITH A SEMICONDUCTOR WAFER IN…
Owned by: KLA CORPORATION
Serial Number: 75407447
REPORTTOOLS
Filed: March 26, 1998
computer hardware for use in performing site map measurements of semiconductor wafers, creating and viewing IMP reports…
Owned by: KLA CORPORATION
Serial Number: 75456792
RECIPETOOLS
Filed: March 26, 1998
Computer software used to provide central recipe storage and to create, edit, and save recipe files regarding semiconductor…
Owned by: KLA CORPORATION
Serial Number: 75457538
KLARITY
Filed: May 18, 1998
computer software for yield management in semiconductor manufacturing
Owned by: KLA CORPORATION
Serial Number: 75488515
NANOMAPPER
Filed: November 5, 1998
Device for the characterizing a substrate namely, non-contact optical imaging comprised of a coherent light source, light…
Owned by: KLA CORPORATION
Serial Number: 75584669
DESORBER
Filed: April 16, 1999
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE…
Owned by: KLA CORPORATION
Serial Number: 75684267
ENVIRONMENTAL FILM DESORBER
Filed: April 14, 2000
SEMICONDUCTOR WAFER PROCESSING EQUIPMENT, NAMELY A UNIT FOR REMOVING A CONTAMINATION LAYER ON A SEMICONDUCTOR WAFER TO IMPROVE…
Owned by: KLA CORPORATION
Serial Number: 76026659
ONWAFER
Filed: June 6, 2000
AUTONOMOUS SPATIALLY RESOLVED ELECTRONIC OR MECHANICAL SENSORS FOR SEMICONDUCTOR MANUFACTURING APPLICATIONS
Owned by: KLA CORPORATION
Serial Number: 76064102
RT/CD
Filed: September 12, 2001
OPTICAL MEASUREMENT DEVICE FOR EVALUATING PERIODIC STRUCTURES ON SEMICONDUCTOR WAFERS
Owned by: KLA CORPORATION
Serial Number: 76313612
ACCELERATING YIELD
Filed: November 2, 2001
Engineering and consulting services in the field of semiconductor and microelectronics design, development, manufacturing…
Owned by: KLA CORPORATION
Serial Number: 76332924
FABVISION
Filed: March 17, 2003
system for storing, managing and analyzing semiconductor manufacturing data that is comprised of computer hardware, computer…
Owned by: KLA CORPORATION
Serial Number: 76501260
AIM
Filed: January 3, 2007
Computer hardware, software and user manuals sold as a unit, and equipment, namely, inspection, metrology and testing hardware…
Owned by: KLA CORPORATION
Serial Number: 77075562
ULTRASHARP
Filed: May 30, 2007
Semiconductor topography equipment, namely, high resolution surface profiling hardware, software, styli and user manuals…
Owned by: KLA CORPORATION
Serial Number: 77193599
ALERIS
Filed: November 12, 2007
Computer hardware, software and user manuals sold as a unit, and equipment consisting of inspection, metrology and testing…
Owned by: KLA CORPORATION
Serial Number: 77327614
