STARLITH
Filed: December 1, 1997
lens objectives for use with wafersteppers and illuminators
Owned by: CARL ZEISS SMT GMBH
Serial Number: 75398011
GALILEO
Very high sensitivity transmission measuring tool comprising a deep ultraviolet broadband light source and a deep ultraviolet…
Owned by: CARL ZEISS SMT GMBH
Serial Number: 76689565
CDC200
Tools for controlling the critical dimensions of photomasks, also commonly referred to as reticles, namely, a machine used…
Owned by: CARL ZEISS SMT GMBH
Serial Number: 76689566
PROVE
Filed: June 9, 2008
measuring instruments to measure positions of structures on photomasks; computer software for use in operating measuring…
Owned by: CARL ZEISS SMT GMBH
Serial Number: 77494458
MERIT
Filed: April 15, 2005
mask repair tools used in the semiconductor industry
Owned by: CARL ZEISS SMT GMBH
Serial Number: 78610169
