DIFFUZOR
Filed: July 16, 1965
ELECTRIC FURNACES
Owned by: BTU ENGINEERING CORPORATION
Serial Number: 72223508
TRANSHEAT
Filed: May 25, 1967
CONVEYOR-TYPE CONTINUOUS FURNACES
Owned by: BTU ENGINEERING CORPORATION
Serial Number: 72272342
OCPL
Filed: June 4, 1981
Process Monitoring Apparatus and Prerecorded Computer Programs for the Supervision and Control of a Diffusion Furnace
Owned by: BTU ENGINEERING CORPORATION
Serial Number: 73313251
WICS
Filed: June 4, 1981
Process Monitoring Apparatus and Prerecorded Computer Programs for the Control of Semiconductor Wafers Being Processed Through…
Owned by: BTU ENGINEERING CORPORATION
Serial Number: 73313252
CROSS FLOW
Filed: January 24, 1990
VACUUM CHEMICAL VAPOR DEPOSITION UNIT FOR USE IN THE FABRICATION OF INTEGRATED CIRCUITS
Owned by: BTU ENGINEERING CORPORATION
Serial Number: 74022071
