OPTALARM
Filed: October 19, 1998
rotameters having electronic readout
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 75573094
INTELLIFLOW
Filed: January 13, 1999
Mass flow controllers, parts, and fittings, for measuring and controlling gas flow
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 75620597
KI
Mechanical and electronic flow meters for gases and liquids; flow meters with valves; flow meters without valves; inline…
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 77401817
CELERITY
Filed: March 8, 2002
Manufacture of [flow control systems, gas systems, valve manifold boxes, gas isolation boxes, gas sticks,] mass flow controllers…
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 78113613
XACTORR
Filed: April 5, 2002
Capacitance-type vacuum gauge for measuring the degree of vacuum in a process chamber or vacuum line
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 78119743
CELERITY
Filed: August 8, 2002
Manufacture of [ flow control systems, gas systems, valve manifold boxes, gas isolation boxes, gas sticks, ] mass flow controllers…
Owned by: BROOKS INSTRUMENT, LLC
Serial Number: 78152505
