TEGAL CORPORATION
Filed: October 26, 1979
Plasma Reactor for Cleaning, Etching or Treating Articles in an RF Induced Plasma
Owned by: Tegal Corporation
Serial Number: 73236826
PLASMALINE
Filed: October 26, 1979
Plasma Reactor for Cleaning, Etching, and Treating Semiconductor Wafers in a Radio-Frequency-Induced Plasma
Owned by: Tegal Corporation
Serial Number: 73236833
TEGAL COMPLETE CUSTOMER SATISFACTION
Filed: June 26, 1987
PLASMA REACTOR EQUIPMENT, NAMELY, GAS HANDLING UNITS, RF GENERATORS, ELECTRICAL POWER SUPPLIES, DIGITAL CONTROLLERS, AND…
Owned by: Tegal Corporation
Serial Number: 73668780
HRE-
Filed: September 12, 1994
high density reflected electron plasma reactor used to etch materials for the manufacture of semiconductor devices
Owned by: Tegal Corporation
Serial Number: 74572276
ZERO CONSUMABLES
Filed: September 12, 1994
silicon wafer plasma etch system that does not consume it internal components
Owned by: Tegal Corporation
Serial Number: 74572277
T TEGAL
Filed: September 12, 1994
corporate name and company logo used to identity a (company that supplies plasma etch systems used in the manufacture of…
Owned by: Tegal Corporation
Serial Number: 74572630
NOVOL
Filed: April 1, 1998
SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ETCHING TOOLS FOR USE IN ETCHING NON-VOLATILE AND LOW VOLATILITY MATERIALS AND FILMS…
Owned by: Tegal Corporation
Serial Number: 75460085
TEGAL
SEMICONDUCTOR PROCESSING TOOLS, NAMELY, ETCHING TOOLS FOR USE IN ETCHING INTEGRATED CIRCUITS, THIN FILM HEADS, FLAT PANEL…
Owned by: Tegal Corporation
Serial Number: 75873098
981
SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNIT, RF GENERATOR, ELECTRICAL POWER…
Owned by: Tegal Corporation
Serial Number: 76201854
901G
SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATORS, ELECTRICAL POWER…
Owned by: Tegal Corporation
Serial Number: 76201857
I903
SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATORS, ELECTRICAL POWER…
Owned by: Tegal Corporation
Serial Number: 76201861
983
SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATOR, ELECTRICAL POWER…
Owned by: Tegal Corporation
Serial Number: 76201862
903G
SEMICONDUCTOR MANUFACTURING MACHINE CONSISTING OF AN ETCHING CHAMBER, GAS HANDLING UNITS, RF GENERATORS, ELECTRICAL POWER…
Owned by: Tegal Corporation
Serial Number: 76201864
I901
Semiconductor manufacturing machine consisting of an etching chamber, gas handling unit, RF generator, electrical power…
Owned by: Tegal Corporation
Serial Number: 76201866
SPECTRA
Device processing tools, namely plasma etching reactors, namely, plasma source hardware, reactor process chambers, reactor…
Owned by: Tegal Corporation
Serial Number: 76228216
NLD
Semiconductor wafer processing machines
Owned by: Tegal Corporation
Serial Number: 78414028
SIMPLUS
Semiconductor wafer processing machines
Owned by: Tegal Corporation
Serial Number: 78414643
ONCORE
Semiconductor manufacturing machines
Owned by: Tegal Corporation
Serial Number: 78449048
