NANOSPEC
Filed: April 14, 1981
Automatic Film Thickness Gauge
Owned by: ONTO INNOVATION INC.
Serial Number: 73305831
NANOSTANDARD
Filed: July 22, 1994
film thickness reference standards for calibration of film thickness measurement instruments
Owned by: ONTO INNOVATION INC.
Serial Number: 74552348
PROCESSWORKS
Filed: April 10, 1995
computer programs for use in process control applications used in the field semiconductors
Owned by: ONTO INNOVATION INC.
Serial Number: 74658890
NANOMETRICS
Filed: June 25, 1996
scientific instruments, based principally upon optical microscope, electron microscope, spectrophotometer, ellipsometer…
Owned by: ONTO INNOVATION INC.
Serial Number: 75145658
METAPULSE
Filed: February 25, 1997
instruments for the measurement of thicknesses and adhesion properties of metal and opaque films
Owned by: ONTO INNOVATION INC.
Serial Number: 75247830
SPECTRALASER
Filed: March 18, 1997
ellipsometer based apparatus for transparent film thickness measurement for use in the semiconductor, disk drive, magnetic…
Owned by: ONTO INNOVATION INC.
Serial Number: 75259026
VANGUARD
Filed: March 18, 1997
apparatus for film thickness measurement, namely, ellipsometers, spectroscopic ellipsometers, reflectometers, spectroscopic…
Owned by: ONTO INNOVATION INC.
Serial Number: 75259027
YIELD MINE
Filed: April 27, 1999
Computer software for the semiconductor manufacturing process for the purpose of data analysis and data storage to improve…
Owned by: ONTO INNOVATION INC.
Serial Number: 75694238
FLEXTRACT
Filed: April 27, 1999
computer software for the semiconductor manufacturing process for the purpose of data access to improve the manufacturing…
Owned by: ONTO INNOVATION INC.
Serial Number: 75694239
YIELD BASE
Filed: June 21, 1999
Computer software for the semiconductor manufacturing process for the purpose of data storage to improve the manufacturing…
Owned by: ONTO INNOVATION INC.
Serial Number: 75732866
YIELD DYNAMICS
Filed: June 21, 1999
Computer software for the semiconductor manufacturing process for the purpose of data analysis and data storage to improve…
Owned by: ONTO INNOVATION INC.
Serial Number: 75732970
NSX
Filed: May 2, 2000
Inspection equipment and devices, namely, equipment and devices that sense and/or capture images of semiconductor and electronic…
Owned by: ONTO INNOVATION INC.
Serial Number: 76038964
INTEGRATED METROLOGY
Filed: June 22, 2000
Thin film and wafer surface measurement and inspection products which are designed to fit inside or be mounted onto production…
Owned by: ONTO INNOVATION INC.
Serial Number: 76075179
WAFERWORX
Filed: August 28, 2000
process control system comprised of data analysis software, and imaging and inspection hardware and software used for quality…
Owned by: ONTO INNOVATION INC.
Serial Number: 76117626
NANONET
Filed: August 6, 2001
Computer software for networking two or more metrology instruments together, exchanging files and folders over the network…
Owned by: ONTO INNOVATION INC.
Serial Number: 76294267
OCD
Filed: August 13, 2001
metrology instrument utilizing an optical technique for measuring microscopic features on samples, namely, semiconductor…
Owned by: ONTO INNOVATION INC.
Serial Number: 76298039
PRECISIONWORX
Filed: January 28, 2002
HARDWARE AND SOFTWARE SYSTEMS COMPRISING COMPUTERS, COMPUTER SOFTWARE, ELECTRONIC HARDWARE AND MECHANICAL HARDWARE FOR MICROPOSITIONING…
Owned by: ONTO INNOVATION INC.
Serial Number: 76364759
ATLAS
Filed: October 14, 2003
Metrology equipment that employs polarized, normal incidence spectroscopic ellipsometry for linewidth profile and critical…
Owned by: ONTO INNOVATION INC.
Serial Number: 76551346
NANOSTATION
Filed: November 14, 2007
Advanced multi-core computer system comprised of computer software and computer hardware for modeling complex grating structures…
Owned by: ONTO INNOVATION INC.
Serial Number: 76684036
LYNX
Filed: November 10, 2008
A fully automated, environmentally controlled, wafer handling system, primarily composed of a high-speed robot, control…
Owned by: ONTO INNOVATION INC.
Serial Number: 76694146
ADVENTAEDA
Filed: February 8, 2007
Computer software for use in monitoring and testing automated software and semiconductor manufacturing equipment used in…
Owned by: ONTO INNOVATION INC.
Serial Number: 77103089
ARTIST
Filed: February 8, 2007
Downloadable computer software used for monitoring of manufacturing equipment and production processes in the semiconductor…
Owned by: ONTO INNOVATION INC.
Serial Number: 77103144
AUTOSHELL
Filed: February 8, 2007
Downloadable computer software used to create customized factory automation systems in the semiconductor industry
Owned by: ONTO INNOVATION INC.
Serial Number: 77103152
CONTROLWORKS
Filed: February 8, 2007
Downloadable computer programs for controlling semiconductor device manufacturing processes and equipment
Owned by: ONTO INNOVATION INC.
Serial Number: 77103185
DISCOVER
Filed: March 21, 2007
Computer software for data and yield management in semiconductor manufacturing
Owned by: ONTO INNOVATION INC.
Serial Number: 77136418
DYNAMIC INTERFEROMETRY
Filed: May 15, 2007
Interferometers
Owned by: ONTO INNOVATION INC.
Serial Number: 77181852
RUDOLPH
Filed: May 24, 2007
METROLOGY INSPECTION SYSTEMS COMPRISED OF ONE OR MORE LIGHT SOURCES, ONE OR MORE CAMERAS AND/OR SENSORS IN COMMUNICATION…
Owned by: ONTO INNOVATION INC.
Serial Number: 77189720
RUDOLPH
Filed: May 24, 2007
METROLOGY INSPECTION SYSTEMS COMPRISED OF ONE OR MORE LIGHT SOURCES, ONE OR MORE CAMERAS AND/OR SENSORS IN COMMUNICATION…
Owned by: ONTO INNOVATION INC.
Serial Number: 77189724
EXPLORER
Filed: September 6, 2007
System for optical semiconductor wafer inspection comprising interchangeable modules, each module being designed for a separate…
Owned by: ONTO INNOVATION INC.
Serial Number: 77273013
IMPULSE
Filed: March 3, 2008
Thin film, structure, and wafer surface measurement devices, namely, metrology and inspection tools that are designed to…
Owned by: ONTO INNOVATION INC.
Serial Number: 77411874
NANODIFFRACT
Filed: January 21, 2009
Optical Critical Dimension (OCD) computer software used for modeling and analysis of physical structures on semiconductor…
Owned by: ONTO INNOVATION INC.
Serial Number: 77653441
GENESIS
Filed: January 20, 2004
Computer software used in the design and manufacture of semiconductor chips and flat panel displays
Owned by: ONTO INNOVATION INC.
Serial Number: 78354473
UNIFIRE
Filed: February 17, 2011
Metrology system for inspection and measurement of semiconductor wafers and similar substrates in various stages of processing…
Owned by: ONTO INNOVATION INC.
Serial Number: 85244590
TRAJECTORY
Filed: February 17, 2011
Optical metrology apparatus for measurement of semiconductor wafers; optical metrology apparatus for integration with other…
Owned by: ONTO INNOVATION INC.
Serial Number: 85244592
ACCUFIZ
Filed: May 24, 2011
Interferometers
Owned by: ONTO INNOVATION INC.
Serial Number: 85329292
PHASECAM
Filed: February 27, 2012
Interferometers
Owned by: ONTO INNOVATION INC.
Serial Number: 85553699
PROCESS SENTINEL
Filed: October 3, 2012
COMPUTER APPLICATION SOFTWARE FOR ANALYZING DATA RELATING TO DEFECTS, EXCURSIONS OR VARIABILITY IN SEMICONDUCTOR SUBSTRATES…
Owned by: ONTO INNOVATION INC.
Serial Number: 85744551
TRUEADC
Filed: December 5, 2012
Computer software for assessing and categorizing defects in a workpiece including semiconductor substrates, integrated circuit…
Owned by: ONTO INNOVATION INC.
Serial Number: 85795170
JETSTEP
Filed: February 22, 2013
Machines for manufacturing semiconductors
Owned by: ONTO INNOVATION INC.
Serial Number: 85857079
SONUS
Filed: August 20, 2013
INSTRUMENTS FOR THE MEASUREMENT OF THICKNESSES, DIMENSIONS AND ADHESION PROPERTIES OF METAL AND OPAQUE FILMS USED IN SEMICONDUCTOR…
Owned by: ONTO INNOVATION INC.
Serial Number: 86042410
