Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor manufacturing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor substrates manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor substrates manufacturing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing machines; Electronic components, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor wafer processing equipment, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing equipment; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Measurement apparatus and instruments, namely, pressure measuring apparatus and distance measuring apparatus for use in semiconductor manufacturing, semiconductor substrates manufacturing, and semiconductor wafer processing; Tools and equipment, namely, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor manufacturing; Tools and equipment, namely, namely, electrodes, electrostatic chucks, pedestals with signal transmitter, o-rings with readable circuitry antenna or signal transmitter, edge rings with readable circuitry antenna or signal transmitter, mechanisms for sealing with readable circuitry antenna or signal transmitter, electronic calibrator, electric actuators, electric measurement sensors, recorded operating software for operating semiconductor manufacturing machines, electrical controllers, transducers in the nature of electrical transducers and electro-optic transducers, electronic signal transmitters, electronic signal receivers, coaxial cables, fiber optic cables, Pressure and optical sensors, showerhead having electronic sensors and signal transmitters, pumps with electronic sensors and signal transmitters, vacuum gauges with electronic sensors and signal transmitters, pipes with electronic sensors and signal transmitters, tubes for chemicals with sensors or electronic circuitry or signal transmitter, feed lines with sensors or electronic circuitry or signal transmitter, fans with electronic sensors and signal transmitters, power supplies electrical, power cables, doors with electronic sensors and signal transmitters, windows with electronic sensors and signal transmitters, and chamber walls with electronic sensors and signal transmitters all for semiconductor wafer processing