Recorded computer software comprising a library of 3d models and design tools for computer aided design of micro-electro-mechanical systems (MEMS); Recorded computer software for designing and manufacturing semiconductors and micro-electro-mechanical systems (MEMS); Recorded computer software for virtual prototyping of three-dimensional models for the design of semiconductor devices; Recorded computer simulation software for modeling semiconductor manufacturing; Recorded computer simulation software for modeling plasma; Recorded virtual reality and augmented reality software for the design, development, manufacture, processing, and fabrication of semiconductor substrates or devices; Recorded virtual reality and augmented reality software for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Computer hardware and recorded software systems for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Downloadable interactive multimedia computer program for the installation, operation, maintenance, and repair of semiconductor manufacturing machines, semiconductor substrates manufacturing machines, semiconductor wafer processing machines; Components for semiconductor manufacturing machines, substrate manufacturing machines, wafer processing machines, wafer processing equipment; Measurement apparatus and instruments for use in semiconductor manufacturing, semiconductor substrates manufacturing, and semiconductor wafer processing