Computer software; computer hardware and software for the collection of data; computer hardware for remotely accessing and transmitting data; computer software for monitoring system status and supply of vacuum-related data, exhaust reduction, chemical use and gas use, related to the manufacture of semiconductors and integrated circuits; computer software for design and configuration of gas, chemical, vacuum and exhaust management systems, including data on inlet pressure, engine speed, power consumption, oil temperature, discharge temperature or inlet pressure; computer software for remotely accessing and controlling a computer system; computer software for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; computer software for recording and display of data relating to status, operation, function, environment, failures and/or errors of pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; computer software for the configuration of pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps, and controllers therefor; computer software for updating firmware for monitoring status, operation, function, environment, failures and errors of pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; computer software for designing and configuring gas, chemical, vacuum and exhaust management systems; computer software for use in controlling vacuum pump systems and keypad/displays for vacuum pump systems; computer interface software; computer software for data integration; intelligent gateways for data processing; user interface software, user interface display; configurable interface, configurable user interface; programmable controls; programmable controllers; programmable control apparatus; programmable displays; data processing equipment and computers; data transmitters; data collection apparatus; real-time data processing apparatus; monitoring, communication and analysis equipment; hardware and software for use in diagnostic and support services for manufacturing processes; electrical controls, electric control devices for pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; electric and electronic controllers for pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; electrical controlling devices for pumps and vacuum pumps; electrical controlling devices for dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; wireless controllers to remotely monitor and control the function and status of other electrical, electronic, and mechanical devices or systems; electronic display monitors, display monitors; information display terminals; displays for control devices and controllers for pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; remote controls, remote control apparatus, remote control receivers, remote control transmitters; industrial controllers, industrial controllers for pumps and vacuum pumps; power controllers, electronic power controllers, power controllers for pumps, vacuum pumps, dry vacuum pumps, screw vacuum pumps, dry screw vacuum pumps, claw vacuum pumps, dry claw vacuum pumps, roots vacuum pumps, dry roots vacuum pumps, dry roots/claw vacuum pumps, scroll vacuum pumps, dry scroll vacuum pumps, piston vacuum pumps, oil sealed vacuum pumps, oil flooded vacuum pumps, diffusion vacuum pumps, turbomolecular vacuum pumps, dry turbomolecular vacuum pumps; pump controllers, vacuum pump controllers, dry vacuum pump controllers, screw vacuum pump controllers, dry screw vacuum pump controllers, claw vacuum pump controllers, dry claw vacuum pump controllers, roots vacuum pump controllers, dry roots vacuum pump controllers, dry roots/claw vacuum pump controllers, scroll vacuum pump controllers, dry scroll vacuum pump controllers, piston vacuum pump controllers, oil sealed vacuum pump controllers, oil flooded vacuum pump controllers, diffusion vacuum pump controllers, turbomolecular vacuum pump controllers, dry turbomolecular vacuum pump controllers