Machine devices for the manufacturing, processing, etching, cleaning, polishing, exposing, roughening and drying of semiconductors, specifically for the manufacturing, processing, etching, cleaning, polishing, exposing, roughening and drying of semiconductors, especially under vacuum conditions, machine devices, namely, manipulators, conveying machine devices, and pneumatic machine devices for the transportation of semiconductors, machine devices for the surface etching, cleaning, polishing, roughening, and drying of semiconductors, chemical etching machines for chemical etching of semiconductor surfaces, machine used for chemical vapor deposition on semiconductor surfaces, especially under vacuum conditions (CVD-systems), conveyors, manipulators, transporters, and machine devices for transport or preparation or handling of semiconductors, conveyors, manipulators, transporters, and machine devices for transport or handling or preparation of photovoltaic elements, conveyors, manipulators, transporters, and machine devices for transport or handling or preparation of flat panel displays

Computer hardware and software for the operation of systems and devices for the thermal treatment of surfaces and objects and for the modification of surfaces, specifically of surfaces of semiconductors, namely, for the operation of diffusion ovens, run through ovens, systems for chemical vapor deposition of semiconductor surfaces, burn in ovens, and vacuum ovens; computer hardware and software for the operation of devices for the cleaning of gases and waste gases, namely, for the operation of devices for cleaning waste gases like waste gas scrubbers

Systems and devices for thermal treating or manufacturing processes, namely, diffusion ovens, run through ovens, coatings ovens, burn in ovens, vacuum ovens; plants for chemical vapor deposition on surfaces (CVD plants), especially under vacuum conditions; gas purification plants for treatment and purification of gases and waste gases, gas purification plants for diversion of waste gases into the surroundings