Load handling machines and apparatus, namely conveyors; load sorting machines; rotation type power-operated article storage apparatus, namely shelves and racks which rotate along a circular guide vertically and horizontally for ease of object deposit and removal; flow type power-operated article storage apparatus, namely shelves having roller chains laid thereon for feasible movement of storage containers; carrying power-operated article storage apparatus, namely assemblies of shelves movable on the floor which create a working space between opposing shelves; palletizing robots; automatic warehousing systems comprised primarily of high-rise constructed shelves and an article storing and retracting crane having a carriage movable along the shelves; pallet washing machines; car mat washing machines; semiconductor manufacturing machines and apparatus, namely machines and apparatus which provide for the feeding and arranging semiconductors in next processes in a clean room; integrated circuit manufacturing apparatus, namely machines and apparatus which provide for the feeding and arranging of integrated circuits in next processes in a clean room