[ Scientific, surveying, electric, optical, and measuring apparatus and instruments, namely, scanning probe microscopes, scanning electron microscopes and atomic force microscopes; ] electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for non-optical microscopes and optical near field microscopes; electric and electronic and micro-mechanical and micro-electromechanical sensors for detection of pressure, gases, temperature, intensity of light, forces, acceleration, vibrations, nick angle, humidity, distances, speed, roughness, thickness, acoustic waves, and molecules, for measuring surface topography, height, electrical and magnetical surface properties, potentials and currents; electric and electronic and micro-mechanical and micro-electromechanical sensors and probes for atomic force microscopy, for scanning probe microscopy, and for scanning electron microscopy; electric and electronic and micro-mechanical and micro-electromechanical sensors comprised of micro-mechanical cantilevers and membranes