leasing and lease agreements for lithographic and doping machines for producing images, and printing or doping images on wafers and other substrates; therma annealing, etching, doping deposition and planarization machines for semiconductor applications; electron-beam columns and systems; reticles and masks for use with said lithographic and implanting machines; special tooling, manuals and software for the aforesaid goods; and parts, gases, software, manuals and other materials therefore