Machines and machine tools for microelectronics, medical equipment techniques, biotechnology, microsystem techniques, semiconductor technology, nanotechnology, wafer bonding, lithography equipment; machines for manufacturing electronic components and optical and technical devices; precision machines as well as spare parts for the same; self-regulating pumps

Scientific apparatus and instruments for microelectronics, for medical equipment techniques, biotechnology, microsystem techniques, semiconductor and nanotechnology; surveying devices, electric, photographic, optical, measuring, signalling, and monitoring devices, in particular for precision systems in the semiconductor technology, in microelectronics, in medical equipment techniques, biotechnology, microsystem techniques, and nanotechnology; apparatus for chemical analysis; chips, integrated circuits; computer operation programs; peripheral equipment for computer; data processing units, data processing devices and computer; computer software; diagnosis devices in bio-chip format, namely, oligonucleotide-arrays, miniaturized immunologic test-arrays, substance libraries, combinatorial substance libraries on chip surfaces for scientific purposes; electric systems for remote controlled industrial operational processes; computer systems for manufacturing plants for microelectronics, medical equipment techniques, biotechnology, microsystem techniques, and nanotechnology; protective masks and filters therefor for use with photographic and photolithographic equipment and photographic film processing; devices for telecommunications; telegraphic transmitting apparatus; telecopying devices; telephones; semiconductors; capillary tubes; monitoring devices (electric); couplers (data processing equipment); special furniture for laboratories; laser (for non-medical purposes); reading devices (data processing); measuring instruments; measuring devices; material testing instruments and machines; diaphragms for scientific apparatus; optical apparatus and instruments; photographic apparatus and instruments; physical and chemical laboratory apparatus and instruments; precision measuring devices; projectors; protective clothing, in particular for clean-rooms; silicon wafers; probes for scientific purposes; spectroscopes; finders for photographic equipment

Scientific and technological services and research and design relating thereto; industrial analysis, industrial research and industrial design services; quality control and authentication services; design and development of computer hardware and software; scientific laboratory services; engineering; computer programming; engineering and scientific services; evaluations, estimates, research and reports in the scientific and technological fields; technological consultancy; software as a service (SaaS); platform as a service (PaaS); conducting technical project studies; material testing; calibration; construction drafting; research and development of new products for others; research in the field of physics; mechanical research; engineering services; development of precision systems and devices for the semiconductor technology; development of devices for microsystem techniques, microelectronics, medical techniques, biotechnology, telecommunication, wafer bonding, lithography equipment; providing systems technology solutions for sensorics and diagnostics, in particular of biology and medicine; research work in the field of bio-technology; research work in the field of microsystem technology, nanotechnology, wafer bonding, lithography equipment; research work in the field of bio-sensorics and chemical sensorics; technological consulting for third parties concerning handling production plants and process equipment; microsystem technology and nanotechnology services; providing temporary use of non-downloadable computer programs for data processing